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Other articles related with "critical dimension"：
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50601 |
Fang Wang(王芳), Yushu Shi(施玉书), Wei Li(李伟), Xiao Deng(邓晓), Xinbin Cheng(程鑫彬), Shu Zhang(张树), and Xixi Yu(余茜茜) |
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Characterization of a nano line width reference material based on metrological scanning electron microscope |
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Chin. Phys. B
2022 Vol.31 (5): 50601-050601
[Abstract]
(328)
[HTML 0 KB]
[PDF 5236 KB]
(114)
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30601 |
Ziruo Wu(吴子若), Yanni Cai(蔡燕妮), Xingrui Wang(王星睿), Longfei Zhang(张龙飞), Xiao Deng(邓晓), Xinbin Cheng(程鑫彬), Tongbao Li(李同保) |
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Amorphous Si critical dimension structures with direct Si lattice calibration |
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Chin. Phys. B
2019 Vol.28 (3): 30601-030601
[Abstract]
(659)
[HTML 1 KB]
[PDF 3718 KB]
(146)
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84201 |
Chen De-Liang (陈德良), Cao Yi-Ping (曹益平), Huang Zhen-Fen (黄振芬), Lu Xi (卢熙), Zhai Ai-Ping (翟爱平 ) |
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Optimum design of photoresist thickness for 90-nm critical dimension based on ArF laser lithography |
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Chin. Phys. B
2012 Vol.21 (8): 84201-084201
[Abstract]
(1289)
[HTML 1 KB]
[PDF 751 KB]
(1801)
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